UV laser generated micro structured black surface on commercial TiO2-containing glass

Abstract

ArF excimer laser (193 nm, 20 ns) irradiation of commercially available TiO2-containing glasses in ambient air leads to a darkening of the surface and a bumpy surface micro structure. This process goes along with a phase separation between silicon-rich and titanium-rich phase near the glass surface. The black appearance can be attributed to the light scattering of the micro structured surface and absorption due to partial reduction of the titanium oxide. The process can be applied for marking the glass surface with high contrast.