Abstract
UV Nanoimprint Lithography combined with lens molding represent a flexible and low-cost pattern replication technique which was investigated with focus on pattern shape, size and imprinted surface quality. The flexibility of this method in imprinting different shape patterns by means of adjustable base layer thickness as well as the reliable fabrication of high quality surfaces using both standard and high refractive index resins was demonstrated using SmartNIL <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">®</sup> processes. The use of a Moiré-type lens master template fabricated by two-photon technology was proven for SmartNIL <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">®</sup> replication, providing an attractive solution for both prototyping, as well as high volume manufacturing processes.Finally, the fabrication of large lenses geometry with reliable shape replication for use in microoptical components was proven by means of UV molding processes at wafer level scale.
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