Abstract
ABSTRACTUV excimer laser-induced deposition of palladium from spin coated palladium acetate films in air is described. We have investigated mainly the deposition of palladium on aluminum oxide and quartz substrates and its dependence on the fluence and the number of excimer laser pulses. The decomposition mechanism was studied by measuring in situ the transmitted pulse energy during the exposure process. We have found that the excimer laser-induced decomposition of palladium acetate films is mainly pyrolytic and a simple model can be used to describe the decomposition process.
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