Abstract
Louisiana State University (LSU) is developing the Center for Advanced Microstructures and Devices [1] (CAMD) in Baton Rouge, Louisiana. The centerpiece of CAMD will be a 1.2 GeV electron storage ring [2] purchased from Maxwell Laboratories, Inc. The high-tech building for CAMD has been designed by TECH-IV [3] of Baton Rouge with engineering support from Lester B. Knight and Associates [4] of Chicago. The storage ring has been optimized for X-ray lithography. The procedures developed at CAMD for printing integrated circuits may well be of significant importance to US competitiveness in semiconductor and related industries. However, the spectral range of the ring also supports scientific and engineering activities in several other areas.
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More From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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