Abstract
Sugar is a natural food and a common organic compound that widely exists in nature. Sugar features easy patterning, solubility in water, environmental friendliness, low cost, and easy combination with micro-nano process. In this study, sugar is proposed to be used as a micro-nano mask material in micro-nano fabrication. Results show that sugar can be easily used to fabricate various kinds of micro-nano mask patterns on different wettability substrates. The fabrication method based on sugar mask has many advantages; it is diverse, simple, pollution-free, and inexpensive. Besides, sugar is strongly compatible with micro-nano fabrication technology, because it can maintain good peeling properties, good viscosity, and good stability in subsequent micro-nano fabrication and achieve the high-quality transfer of mask patterns. In addition, graphite super-lubricity micro-nano movable devices are made through the proposed sugar mask method, which also has good and reliable performance compared with e-beam lithography. Compared with micro-nano fabrication based on photoresist masks, micro-nano fabrication based on the sugar mask is simpler and cheaper. In the micro-nano processing of the sugar mask, the lift-off and removal of residual sugar can be easily completed using water. In summary, we believe that sugar as a mask material is effective and can be widely used in micro-nano manufacturing.
Published Version
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