Abstract
WO3, activated by 1% Pt or 1% Pd, was deposited by radio frequency co-sputtering process. The as-sputtered films were thermally-treated at 450°C for 24h after co-sputtering. The microstructure, crystal structure and chemical composition of the as-sputtered and thermally-treated films were analyzed by SEM, XRD and XPS. The sensing characteristics of the Pt or Pd activated WO3 films, as well as the pure WO3 films, were characterized with 25-200ppm H2, 25-200ppm CO and 0.62-5ppm NH3 at 50-300°C in air with different humidity.
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