Use of periodic 2D pillar array for performance enhancement of AlN-based SMR BAW resonators

Abstract

This paper discusses the applicability of a two-dimensional (2D) periodic pillar array as the first layer of an acoustic mirror for AlN-based solidly mounted resonators of bulk acoustic waves. It is based on the idea that the periodic pillar array behaves like a uniform layer when the period is much smaller than the wavelength and its behavior is given by the ensemble average of pillar materials. The simulation shows that the effective electromechanical coupling factor can be enhanced close to that of AlN-based film bulk acoustic resonators when the slot ratio is large. It is also shown that the use of a 2D pillar array can enhance the reflectivity of the Bragg reflector. It should be noted that the periodic 2D pillar array can also control the anisotropy of wave propagation along the surface. Owing to this, transverse mode resonances can be suppressed well by adjusting the wave dispersion curve properly.