Unveiling a critical thickness in photocatalytic TiO2 thin films grown by plasma-enhanced chemical vapor deposition using real time in situ spectroscopic ellipsometry

Abstract

TiO2 thin films of various thicknesses have been deposited on silicon at low-temperature by PECVD operating in continuous mode (T < 130 °C) and pulsed mode (T < 80 °C) using oxygen/titanium isopropoxide low-pressure inductively coupled plasma. The study of the crystallinity and microstructure of the films by atomic force microscopy, scanning electron microscopy and x-ray diffraction allowed showing that the roughness and amount of anatase are closely related to the film thickness. The coalescence of large polycrystalline columns emerging from an assembly of thin columns was found to happen at a critical thickness, at about 150 nm in the continuous mode and 250 nm in the pulsed mode. Real time in situ spectroscopic ellipsometry study allowed to monitor the growth and to determine this critical thickness for both plasma modes. The change of morphology type to large columnar structure is associated with an important increase in the photocatalytic activity. The determination of this coalescence thickness by ellipsometry may provide an interesting method to evaluate the impact of process parameters on TiO2 thin films characteristics.