Abstract
Using a combination of chemical etching and thermal annealing methods,we have obtained atomically flat TiO2-terminatedSrTiO3(001) with large terraces. The average width of theterrace is only determined by miscut angles. When we continuously growtens of SrTiO3 monolayers on such a surface under pulsed laserablation deposition condition at 621 degrees C, the growth proceeds in alayer-by-layer mode characterized by un-damped oscillations of thespecular RHEED intensity. After the growth of 180 monolayers, thesurface morphology is restored to the pre-growth condition withsimilarly large terraces after annealing in vacuum for only 30 min,indicating efficient mass transfer on TiO2-terminated terraces.
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