Abstract
Uniform coating of the thick diamond-like carbon (DLC) on the cylindrical pipe, triangular prism and trench of aluminum alloy was studied with the hybrid processing system of plasma-based ion implantation and deposition. In this system, the RF pulse for plasma generation was applied to a substrate with the high-voltage pulse for ion implantation through a joint matching network and a single electrical feed-through. The DLC film with the thickness of a few μm was prepared using the toluene gas (C 6H 5CH 3) and the negative high-voltage pulse (−10 to −20 kV, 2–4 μs and 1–4 kHz). The DLC film thickness profile estimated from the cross-sectional SEM observation was extremely uniform on the surfaces of cylindrical pipe and triangular pole. For the trench with the aspect ratio of 1, the film thickness of top surface was about 1.3 times larger than that of bottom and 1.9 times than the sidewall.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.