Abstract
Gold mesopyramid structures are formed on Si[100] by annealing a eutectic promoting trilayer of Au-Si-Au that enhances their formation. Convex and concave (inverse mesopyramids) mesostructures are produced. The convex Au mesopyramids are typically a few microns in height, while the concave structures are four to five microns deep. Scanning electron microscopy of their surfaces and their cross-sections reveals the presence of surface channels and voids within their interior, respectively. A five-step process is proposed to describe Au mesopyramid formation based on surface tension and spinodal band decomposition. Inverse mesopyramids are concave mesopyramids that collapsed upon the nearly complete reincorporation of Si into the substrate, thereby leaving a microporous Au scaffolding that in some cases is unable to structurally maintain the convex morphology. Lithography and e-beam patterning have been successfully demonstrated as viable approaches for controlling location and nucleation of mesopyramids.
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