Abstract
In general, the profile measuring machine uses the displacement sensor attached on movable mechanism in order to measure the object. It could measure the object profile by the amount of movement of the displacement sensor and output of the displacement sensor. When measuring the object, metrological frame is important as a reference. If the metrological frame has some profile errors, the output of the displacement sensor includes the profile error of the metrological frame. We proposed a new method to distinguish the profile error of the metrological frame from the output of the displacement sensor. This method requires two linear stages and a displacement sensor. The object profile and profile error of the movable mechanism are determined by calculation using output of the displacement sensor. The validity of the new method was confirmed by the simulation andexperiment. It was confirmed to be possible to construct metrological frame below 1μm. As a lot of number of iteration are required, the reduction of iteration was discussed. As a result of reduction of measurement, the uncertainties of measurement are shown and compared.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
