Uncertainty analysis of the LIP vacuum standard for XHV range

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This work analyzes the uncertainty sources of the vacuum standard for extremely high vacuum range constructed at Lanzhou Institute of Physics. To establish XHV calibration with extended lower limit, meanwhile, decreasing the uncertainty at room temperature, the selective pumping technique and a new type of leak element have been adopted. For XHV range (10−10 Pa), the expanded uncertainty of the generated pressure is 7.2% (k = 2), and the total uncertainty of the generated pressure is mainly determined by the base pressure and the measurement process of the conductance of the leak element. Results show that, a relatively lower uncertainty can be obtained for the same throughput by use of the nanofluidic channel leak element which can generate molecular flow with atmospheric gas input.