Abstract

Zinc oxide (ZnO) nano-polycrystalline films were successfully prepared by modified successive ionic layer adsorption and reaction at room temperature technique which was based on the alternate immersion of substrate in the alkaline zinc precursor and deionized water. ZnO films were formed through accumulation of ZnO crystal clusters. The synthesis, microstructure, and optical properties of ZnO nano-polycrystalline films were investigated. Prepared ZnO films exhibited wurtzite structure, with good surface morphology and optical properties. Ethanolamine was employed as a complex reagent, which improved the adsorption of zinc complex with substrate. Effects of technique parameters on the properties of ZnO nano-polycrystalline films were studied in detail. Some parameters, including cycle number of preparation, ratio of zinc to ethanolamine, pH value of precursor and zinc concentration, played key roles in the deposition of ZnO nano-polycrystalline films. Intensive and sharp ultraviolet emission peaks at about 400 nm could be observed in the photoluminescence spectra.

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