Ultrasonically induced nanofatigue monitoring during nanoindentation

Abstract

The ultrasonic nanoindentation tip integrated into a nanoindenter operates at hundreds of kHz, inducing millions of load cycles within seconds at the localized mechanical contact point. Then operating on brittle submicron thick films such as SiC, the resulting accumulated nanofatigue exhibits different contact fracture modes. During the process of quasi-static loading with ultrasonic excitation, the ultrasonic nanoindentation tip monitors associated acoustic waveforms, which can provide additional insights into the nanofatigue process dynamics via advanced acoustic waveform analysis and deep learning classifications.