Abstract

Abstract This paper deals with some constructions and some experimental characteristics of ultrasonic motors using piezoelectric circular or annular plates. In the first part, the theoretical analysis of the non-axisymmetric modes of a circular plate or an annular one is shown. On the basis of this consideration, the mode that is suitable to be used for an ultrasonic motor is determined. In the next part, some constructions and characteristics of the rotary type motor using the two degenerated non-axisymmetric modes are reported. In the last part, construction of the linearly self moving motor using a non-degenerated mode ((1,1)) and a radial mode (R,l) mode is described.

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