Abstract

A new ultrasonic motor using bending modes with single foot is proposed in this study. Two groups of PZT elements are clamped between two horns and two ending caps, respectively, by bolts. Two horns are connected by the driving foot in the middle of the motor. Two orthogonal 3rd bending vibrations of the motor are superimposed and generate elliptical movement at the driving foot. The structure and working principle of the proposed motor are introduced. The structure parameters of the motor are obtained via the ANSYS software. A prototype is fabricated and tested using an impedance analyzer and a scanning laser Doppler vibrometer. The maximum mechanical output force and power of the prototype are measured to be 23 N and 2.9 W, respectively.

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