Abstract
In the framework of the development of an ultrasensitive microfabricated mass sensor for distributed mass sensing applications we present a bulk resonator-based mass sensor. The two devices presented are based on a polysilicon disk resonating at 132 and 66 MHz, respectively, actuated electrostatically in a wine-glass mode. By using bulk mode resonators it has been possible to reduce the thickness of the sensor layer without affecting the resonance frequency, reaching an extremely high distributed mass to a frequency shift sensitivity of 11.3 kHz µm2 fg−1 and a markedly small mass resolution of 8.7 pg cm−2 in air and at room temperature.
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