Abstract
Nitrogenated ultrananocrystalline diamond/hydrogenated amorphous carbon composite films were prepared in hydrogen and nitrogen mixed-gas atmospheres by pulsed laser deposition using graphite targets. The electrical conductivity in n-type conduction remarkably increase at room temperature with an increase in the nitrogen content. In the nitrogen content range from 7.9 to 10.4 at.%, the electrical conductivity is dramatically decreased and this accompanied by the disappearance of diamond grains in the films. Grain boundaries owing to the existence of diamond grains embedded in UNCD/a-C:H films, which is structural specific to UNCD/a-C:H, should play a significant role in the large electrical conductivity enhancement by nitrogen doping. The X-ray photoemission and near-edge X-ray fine-absorption spectroscopic measurements could not detect an evident difference in the spectra that explain the sudden irregular change in the electrical conductivity
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