Abstract

Ultralow frequency vibration tables can easily be imposed external interferences when they work. These interferences result to distortion of the output and can reduce the calibration precision. Closed-loop negative feedback method was put forward to reduce the output distortion of an ultralow frequency vibration table. Firstly, we analyzed its structure and principle. Also the reasons of the output distortion of the system was analyzed. The new system was based on DSP unit. And the system is more flexible, higher running speed and better interference immunity. Experiments show that the distortion of the new system can be effectively improved based on negative feedback method.

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