Abstract

Research and development on UHV gauges were started in China in 1953. Since then incessant efforts have been devoted to improvements of Bayard–Alpert gauges, suppressor gauges, extractor gauges, deflector gauges, and modulated Bayard–Alpert gauges. Performances of various gauges, from a special gauge with all electrodes degassed by direct resistance heating, to a shielding gauge with no photocurrent effect are briefly reviewed in the present paper. Finally, a method for UHV gauge calibration is suggested and a new quadrupole structure for partial pressure measurement is described.

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