Abstract

A novel dicing technology with high rigidity and hardness was developed for difficult-to-cut materials such as cemented carbide. The highly precise and ultra-thin dicing blade of 20 μm thick and free of crack was manufactured from a round body of polycrystalline diamond (PCD) by an electrical discharge process and ultra-violet assisted polishing. The blade has continuous cutting edges made of crystal grain boundary of PCD. Therefore, fine grooves can be cut in the cemented carbide with ductile-mode. In addition, the autogenous cutting edge regeneration effect was confirmed by partly maintaining the roughness of cutting edge without blunting the PCD surface state. It is speculated that cemented carbide particles detached from the workpiece caused micro-cracks to regenerate the cutting edges on the PCD blade. Finally, it was demonstrated that ultra-fine grooves with high aspect ratio of 20 μm width and 1 mm depth could be cut in a cemented carbide substrate, which has never been achieved in the past.

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