Ultrafast Silicon MZI Optical Switch With Periodic Electrodes and Integrated Heat Sink

Abstract

The compact, high-speed, low-power consumption Mach-Zehnder interferometer (MZI)-type optical switch using thermo-optical effect is a key device in future optical integrated circuits. In this study, we achieved ultra-high-speed switching operation of 0.4 μs and low electrical power operation of 23 mW with a small device footprint by loading an asymmetric doped MZI structure and an integrated heat sink. This optical switch can be fabricated in the standard manufacturing process of silicon photonic devices, has high practicality and will be a useful tool in various optical integrated circuits.