Abstract

AbstractUltrafast lasers are an excellent tool for processing almost all materials and for micromachining structures and geometries with sizes ranging from nanometers to millimeters. Their only weakness, the low average power of the beam source and therefore the lack of potential for high throughput, disappeared with the development of ultrafast lasers with average powers exceeding 1 kW. With the high average power, a new challenge has emerged for systems engineering and process development: achieving high throughput micromachining with high average power ultrafast lasers while maintaining high quality.

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