Abstract
Multilayer fullerene-like hydrogenated carbon (FL-C:H) films were synthesized by using the chemical vapour deposition technique with a different flow rate of methane. The typical fullerene-like structure of as-prepared films was investigated by using transmission electron microscopy and Raman spectra. The prepared multilayered FL-C:H films showed a high elastic recovery ( $${\sim }$$ 90 $$\%$$ ), ultra-low friction coefficient ( $${\sim }$$ 0.019) and low wear rate $$({\sim }3.0\times 10^{-9}\,\hbox {mm}^{3}\,\hbox {Nm}^{-1})$$ in humid air.
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