Abstract
Using pulsed dc magnetron sputtering, we synthesized hydrogenated amorphous carbon films with and without sulfur doping. These films were smooth and amorphous, with low compressive stress (< 1 GPa). Auger electron spectroscopy confirmed the incorporation of sulfur, and X-ray photoelectron spectroscopy showed that sulfur atoms are chemically bound. Most significant, ball-on-flat tribo-testing showed that hydrogenated carbon films doped with 5 at.% sulfur have ultra-low friction coefficients (< 0.01) in air with relative humidity from 0% to 50%.
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