Abstract
1.IntroductionThe demands made on the design of a high-performance SEM column are multiple and contradictory. It should provide outstanding image resolution at all beam energies with samples of all sizes and at any (reasonable) tilt angle. It should also allow excellent signal detection under all operating conditions and a high x ray take-off angle at a working distance suitable for high-resolution microscopy. A novel design concept for the electron optics of the SEM has been implemented in a new high-performance instrument (named DSM 982 GEMINI) in order to meet these goals.2.Advanced electron-optical columnA Schottky field emission source is used in the new SEM. This gun type exhibits the ideal point-source properties for a high-performance instrument. Optimum conservation throughout the column of the very high beam brightness (107 A/cm2.sr.kV) and the very low beam energy spread (0.4 eV) supplied by the gun is achieved by the implementation of a new electron optical principle: a high beam energy is maintained throughout the column (regardless of of the electron probe energy selected by the operator) and any beam cross-over is avoided (Fig. 1).
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