Abstract
The U.S. Navy supported a manufacturing technology program to evaluate the potential of ion implantation for industrial-scale treatment of components for wear and corrosion protection. In this paper the overall project is described, the experiments conducted to define constraints imposed by heat removal, sputtering at non-normal angles of incidence, and contamination of the surface by residual gases in the chamber atmosphere are reviewed and the manner in which these problems were solved in the MANTECH facility is illustrated. Finally an economic assessment of ion implantation under batch processing conditions will be presented.
Published Version
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