Abstract
A self-consistent fluid model is developed to simulate the radio-frequency (rf) plasma sheath dynamics over a nonflat electrode, with a magnetic field applied perpendicular to it. The model consists of the two-dimensional (2D) time-dependent fluid equations, coupled with the Poisson equation, and it uses an equivalent-circuit model to self-consistently determine the relationship between the instantaneous voltage at the rf-biased electrode and the sheath thickness. In addition to the usual plasma molding effects, different properties of the azimuthal ion flow associated with the E×B drift are observed and studied under varying discharge pressures and the magnetic field intensities. It is found that the azimuthal flow exhibits rather nonuniform distribution with a peak around the edge of a hole in the electrode. In addition, when the discharge pressure increases, the velocity of the azimuthal ion flow, as well as the velocities of ion flow in all other directions, are found to decrease, whereas the sheath edge is found to move closer to the electrode. While the variation of the magnetic field is found to have no significant effect on the sheath structure, the azimuthal ion flow velocity is found to increase in proportion to the magnetic field.
Published Version
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