Abstract
The aim of the work was to develop a technology for porous ZnO nanosystems formation and to determine the relationship between their morphology and sensor properties to hydrogen. With this purpose, a two step technology has been used. On the first stage, porous Zn layers with different morphologies have been synthesized under near-equilibrium condensation conditions implemented by means of an accumulating systems plasma-condensate developed by us. On the second stage, the layers have been oxidized in pure oxygen atmosphere. The sensor tests performed at 250°С have shown that sensitivity of the porous layers was more than 50% at hydrogen concentration 3000ppm in dry air.
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