Abstract
Aluminum nitride (AlN) bulk single crystals were grown using physical vapor transport method. The resulting wafers were characterized according to the requirements for electronic device applications. Currently many thousands per year of such 2-inch wafers are used as substrates for UVC-LEDs emitting in the range 215 nm – 270 nm, which is the most efficient germicidal range for many pathogens. Highest crystallinity and the lowest published UV-transparency are confirmed by standard analytical techniques.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
