Two-dimensional nanoparticle arrays formed by dewetting of thin gold films deposited on pre-patterned substrates

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We demonstrate the formation of accurate 2D gold nanoparticle arrays via solid-state dewetting on a pre-patterned substrate. The annealing-induced dewetting of Au film on both flat and pre-patterned SiO2 substrates is investigated. The pre-patterned structures affect clearly the formation of nanoparticles, and there is a depth effect of the pre-patterned grooves on the formation of nanoparticles during dewetting. Especially in pre-patterned areas with deep grid grooves (depth 150 nm) there is almost one single particle formed in the flat areas of every unit square, thus resulting in a very periodic 2D structure of gold nanoparticles.