Abstract
Abstract Tunable metasurfaces can change the optical properties of incident light at will such as amplitude, phase, and polarization in a time-dependent fashion. Ultrafast switching speed and the ability for the pixel size reduction of the tunable metasurface can allow various applications such as light detection and ranging, interferometric sensors, and free space optical communications, to name a few. Although there have been successful demonstrations of the wavefront shaping using the tunable metasurface, the implementation of the two-dimensional metasurface pixel array that can be individually addressed in the optical frequency regime still remains challenging. Here, we present the experimental demonstration of the two-dimensional beam steering with the metasurface array by the binary phase grating in the infrared regime. The metasurface unit cell is composed of metal–dielectric–oxide structure with the indium tin oxide as an active layer, which is modulated by using the top fan-out electrodes. The metasurface array is two-dimensionally pixelated and has the phase change above 137° in the infrared regime.
Highlights
The ability to control the amplitude and phase of light is of critical importance in many applications including as a three-dimensional display, digital hologram, bio-medical the general working principle of the underlying phenomenon of the active metasurface has been elucidated, and a few studies have demonstrated the onedimensional multi-channel operation, the implementation of the two-dimensional pixelated metasurface in the optical regime that can be individually addressed has eluded engineers so far
The metasurface unit cell is composed of metal–dielectric– oxide structure with the indium tin oxide as an active layer, which is modulated by using the top fan-out electrodes
As we apply the electrical bias to the metal–dielectric–semiconductor structure, the charges between the indium tin oxide (ITO) semiconductor layer and the Al2O3/HfO2 dielectric layer are accumulated under the positive bias of the top Au metal layer and are depleted under the negative bias
Summary
The ability to control the amplitude and phase of light is of critical importance in many applications including as a three-dimensional display, digital hologram, bio-medical the general working principle of the underlying phenomenon of the active metasurface has been elucidated, and a few studies have demonstrated the onedimensional multi-channel operation, the implementation of the two-dimensional pixelated metasurface in the optical regime that can be individually addressed has eluded engineers so far. The key challenge in the top fanouts is the degradation of the optical property due to the presence of electrodes in the optical path. Mosallaei and his colleagues have suggested pioneering concept for the two-dimensional gate-tunable metasurface array [21]. Inheriting this theoretical prediction, it would be of critical importance to experimentally demonstrate such concept. It has not been reported experimentally in the optical regime yet, in contrast to the experimental
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