Abstract
We numerically studied both the mass-loading and elastic effects of Au-electrodes on the fundamental thickness-shear (TS) mode of a very thin plate. To solve the two-dimensional forced vibrations of an infinite AT-cut quartz plate with infinite strip Au-electrodes, an efficient technique that utilizes the one-dimensional finite element method was developed. Using the technique, the piezoelectrically induced admittance Yp of the plate was derived with a complex value, and then the frequency f1 and the equivalent inductance L1 of the fundamental TS resonance were calculated as a function of the Au-electrode thickness. The results show that the influence of Au-elasticity on f1 and L1 is negligible compared with mass-loading R, in the wide range of R=0.04–0.36, and that the change of L1 is proportional to R. We also find that the single wave approximation, which was considered to hold only for small R<0.1, holds well even for large mass-loading R=0.36.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
