Abstract
Ba0.6Sr0.4TiO3 (short for BST) thin films were prepared by RF magnetron sputtering. By adjusting annealing conditions, the BST thin films with different grain sizes were obtained. The microstructures of BST thin films were studied by X-ray diffraction (XRD), atomic force microscopy (AFM), and high-resolution transmission electron microscopy (HRTEM). It is found that there are two critical sizes in BST thin films in relation to grain sizes. The crystalline critical size from amorphous to crystalline is about 10 nm. The ferroelectric critical size from cubic (paraelectric) to tetragonal (ferroelectric) is about 20 nm.
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