Abstract
Turbomolecular pumps with magnetic bearings are well known and their advantages have been proved in many applications. Until recently, the advantages of such turbomolecular pumps have been off-set by their high cost and, consequently, their use was limited. A turbomolecular pump with a new concept in magnetic bearings is described in the present paper. In addition to the technical operating advantages, the new bearing allows lower manufacturing costs. This will open up a wide range of new applications for turbomolecular pumps.
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