Abstract
The pumping characteristic of a high-vacuum system depends on a number of factors: the pumping characteristic of a high-vacuum turbomolecular pump (TMP), connecting lines conductivity, pumping characteristic of forevacuum pumping system, leakage of gas into the system, namely gas release streams and gas flows due to leakage of structural elements. The influence of these factors on the pumping characteristic of the vacuum system with TMP is considered in the work. A method for determining the parameters of a forevacuum pump providing an improvement in the vacuum characteristics of a vacuum system with TMN at elevated suction pressures is proposed.
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