Abstract
Multiple tunnel junctions have been realized in silicon using highly doped nanowires in silicon-on-insulator material by making use of pattern-dependent local oxidation. The electrical characteristics show clear Coulomb blockade oscillations of a single dot. On depleting the nanowires with side gates, peak pairing is observed in the oscillations. This characteristic of double dot structures can be explained by the creation of additional tunnel barriers in the nanowire due to the potential distribution caused by the dopants.
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