Abstract

We have investigated the magnetic properties of amorphous Co40Fe40B20 (CoFeB) thin films grown on flexible polyimide (PI) substrates, which were fixed on convex molds with different curvatures during the magnetron sputtering deposition. When the flexible substrates were changed from convex to flat state after fabrication, a uniaxial magnetic anisotropy was induced in the CoFeB film due to magnetostrictive effect. Furthermore, the anisotropy also depends on the thicknesses of the film and substrate. Our results demonstrate a convenient method to tune the anisotropy of magnetic thin films grown on flexible substrates.

Highlights

  • Magnetic anisotropy, which determines the magnetization easy axis, is essential for many devices such as magnetic recording, magnetic sensors, microwave devices, and so on.[1,2,3] Materials with different magnetic anisotropy are needed for various applications.[4,5,6,7] tuning the anisotropy of magnetic materials is of vital importance and has attracted a lot of attention

  • We have investigated the magnetic properties of amorphous Co40Fe40B20 (CoFeB) thin films grown on flexible polyimide (PI) substrates, which were fixed on convex molds with different curvatures during the magnetron sputtering deposition

  • We studied the magnetic properties of amorphous Co40Fe40B20 (CoFeB) thin films on flexible substrates, which show that the anisotropy can be effectively tuned by strain partially due to the negligible magnetocrystalline anisotropy.[13,14]

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Summary

INTRODUCTION

Magnetic anisotropy, which determines the magnetization easy axis, is essential for many devices such as magnetic recording, magnetic sensors, microwave devices, and so on.[1,2,3] Materials with different magnetic anisotropy are needed for various applications.[4,5,6,7] tuning the anisotropy of magnetic materials is of vital importance and has attracted a lot of attention. Various methods, including oblique deposition,[8] annealing in magnetic field,[9] cluster beam deposition,[10] and bending the substrate during film deposition,[11,12] have been investigated. We studied the magnetic properties of amorphous Co40Fe40B20 (CoFeB) thin films on flexible substrates, which show that the anisotropy can be effectively tuned by strain partially due to the negligible magnetocrystalline anisotropy.[13,14]. We have fabricated amorphous CoFeB thin films on pre-bent flexible polyimide (PI) substrates, which have excellent thermal stability, good mechanical, optical, electrical, and chemical properties.[15] Due to magnetostrictive effect, the uniaxial magnetic anisotropy of amorphous CoFeB can be enhanced by increasing the pre-strain of the flexible substrates during film growth.

EXPERIMENTAL
RESULTS AND DISCUSSION
CONCLUSIONS

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