Abstract
We report the design, performance, and characterization of a tunable microwave plasma resonator based on a coaxial transmission line structure operated at atmospheric pressure. The adjustable tuners of the compact device enable over 20 dB enhancement of reflection coefficient by counterbalancing the impedance mismatch. The in situ tuning capability can also neutralize the sudden change in impedance upon plasma discharge, elongating the microwave driven plasma plume. It is observed that the fine adjustment of two small bolts can maintain a high device efficiency up to 96% with plasma load impedance, and a wide operation range can be covered by a single device.
Highlights
Various types of atmospheric pressure plasmas (APPs) have been implemented for many applications as versatile sources of radical species
A validation of the Tunable Coaxial Resonator (TCR) design is performed with a simple coaxial transmission line resonator model in Ansys High-Frequency Structure Simulator (HFSS)
A simple design of a tunable microwave plasma resonator electrode is introduced with its performance and characteristics
Summary
Various types of atmospheric pressure plasmas (APPs) have been implemented for many applications as versatile sources of radical species. The input impedance model for the TCR can be represented by tuner, short, and open networks along the transmission line, Ztuner
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