Abstract
A novel triple-layer array dual-port transmission beam splitter grating with zeroth-order suppressed under normal incidence is described in this paper. The parameters of the grating structure and characteristics of the incident light are analyzed by rigorous coupled-wave analysis (RCWA) and optimized by simulated annealing (SA) algorithm. The grating displays the feature of polarization-independent. To study the specific process of energy coupling in the grating, the simplified modal method (SMM) was added to this paper for analyzing. With the incidence wavelength of 800 nm, high effective efficiencies of 93.08% for TE polarization and 95.48% for TM polarization can be achieved in the ± 1st orders. Furthermore, the proposed beam splitter can exceed the efficiencies of 90% for TE and TM polarizations within a large tolerance range of the period, duty cycle, and incident wavelength.
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