Abstract
The tribological properties of magnetron sputtered amorphous silicon carbide (a-SiC) and silicon carbonitride coatings (a-SiCN) with thickness of 2.2 and 3.4 µm were investigated. Samples were additionally annealed at temperature of 700°C or 900°C in air. Progressive load scratch tests were performed on the annealed samples as well as on the as deposited ones. An acoustic emission signal was detected during all tests using the sample holder with embedded sensor of our own design. Results indicate no change in wear resistance of SiCN sample after high temperature exposure up to 900°C, unlike in the tests of SiC coatings. Detection of acoustic emission generated during the scratch test proved to be a significant improvement for the coating evaluation.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
