Abstract
DLC films were deposited on Si wafers using RF plasma CVD, hot filament (HF) plasma CVD and ECR plasma CVD with plasma-based ion implantation (PBII). Tribological properties of the films were tested using a ball-on-plate friction tester sliding against a steel ball under wide range of conditions. DLC films produced by the three techniques were classified into two groups. DLC films prepared by ECR had good tribological properties over the wide range of conditions tested. DLC films prepared by RF and hot filament techniques showed low friction coefficient and high wear resistance, except for the lower load condition. The wear debris and the worn surfaces were analyzed by a Micro-laser Raman instrument. Micro-structural analyses of the wear debris reveals that ECR-DLC film is different from that of the other two, while the debris of HF-DLC and RF-DLC shows almost the same structure. The change in the structure appears to be correlated with the differences in the tribological behavior of each film.
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