Abstract
The wear properties of diamond-like carbon films deposited on single-crystal silicon using an r.f. plasma enhanced chemical vapour deposition process are analysed as a function of deposition conditions. It is found that the tribological properties of the film are highly dependant on the d.c. self-bias voltage developed between the r.f. driven electrode and the plasma during deposition. The films were tested in dry sliding against steel discs with two different radii of curvature and it was found that the films deposited at higher d.c. self-bias voltages were more wear resistant and offer better protection. When coating failure occurred it was by a process of cracking and delamination.
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