Abstract
Nanoscaled multilayer coatings consisting of alternating layers of different types of amorphous hydrogenated carbon (a-C:H) films were deposited in a plasma activated chemical vapor deposition (PACVD) process. The thickness of the multilayer repeat unit as well as the interface width between these layers were varied by controlling the substrate bias voltage. The influence of the achieved multilayer structure on the tribological properties was investigated. At a certain range of thickness of the multilayer repeat unit, a decrease in wear rate by a factor of ten down to 4×10 −18 m 3 Nm was observed. Another trend observed was the correlation between an abrupt interface and lower wear.
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