Abstract
In the literature it has been reported that graphite- and diamond-like carbon layers have been produced from hydrocarbons by a plasma-activated chemical vapour deposition (CVD) process. In this study we re-investigated this process and we analysed the structure by spectroscopic methods. The films were deposited within a certain deposition parameter range. The analysis has shown that essentially polymer-like films of amorphous hydrogenated carbon are produced by this CVD technique. The structure depends on the deposition parameters and on the hydrocarbon gas used in the CVD process. The polymeric chains seem to be strongly cross-linked which makes them very stable towards organic solvents. The various structures and the nature of electron energy states are discussed in detail.
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