Abstract
A metal-oxide-semiconductor field-effect transistor (MOSFET), which is an elementary unit of microelectronics, was repaired by self-powered electro-thermal annealing with the aid of a wind-driven triboelectric nanogenerator (TENG). It was thermally cured by Joule heat that originated electrically from the MOSFET itself. The configuration of the self-curable system is composed of a MOSFET with an embedded built-in Joule heater and a wind-driven TENG. This self-curable feature is attractive for the construction of remote wireless sensor networks, is capable of sustainable operation for long-term use, has high immunity against external environmental stress as well as internal operation stress, and can reduce labor during the periodic replacement of power sources. • Self-powered electro-thermal annealing was performed to cure the damaged electronic devices. • Electrical output of triboelectric nanogenerator was firstly used as Joule heat generation. • The electronic device was successfully cured by the SP-ETA from plural damage factors: γ-ray and hot carrier injection. • The Self-powered electro-thermal annealing was also verified at charge-trap based flash memory devices.
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