Abstract
Distributed Bragg reflector (DBR)-surface emitting lasers (SELs) with buried heterostructure (BH) are fabricated with the combination of metal-organic chemical vapor deposition (MOCVD), electron cyclotron resonance (ECR) dry-etching and liquid phase epitaxial (LPE) regrowth techniques. Low threshold and stable fundamental lateral-mode characteristics are realized by the optimum design of the cavity diameter and refractive indices. Other important characteristics such as polarization characteristics, series resistance and thermal resistance are also discussed.
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