Transport characteristics of AlGaN/GaN/AlGaN double heterostructures with high electron mobility

Abstract

The AlGaN/GaN/AlGaN double heterostructure (DH) with high electron mobility of 1862 cm2/Vs at room temperature and 478 cm2/Vs at 573 K high temperature was obtained by a combination of optimization schemes considering scattering mechanisms. First, a composite buffer layer structure, including GaN and AlGaN layer, was used to improve the crystal quality of the AlGaN/GaN/AlGaN DH. Second, interface roughness scattering was reduced by increasing the channel thickness, thus the two-dimensional electron gas mobility was further improved. Moreover, an ultrathin AlN interlayer was inserted between the GaN channel layer and the AlGaN buffer layer to decrease the alloy disorder scattering. The Hall effect measurements showed that the DH had better transport characteristics at high temperatures, and an electron mobility of 478 cm2/Vs was achieved at 573 K, which is twice larger than that of the conventional single heterostructure (∼200 cm2/Vs at 573 K). Therefore, AlGaN/GaN/AlGaN DH is more suitable for the applications in high temperature electronic devices.