Abstract
Aluminum doped zinc oxide (ZnO:Al) films which can be used as transparent electrodes or heating layers have been deposited by the low cost spray pyrolysis technique. Undoped and Al-doped ZnO films deposited using various preparation conditions and on different substrates (soda lime glass, quartz glass and crystalline quartz, respectively) have been studied. The effect of substrate type, temperature, deposition time and doping concentration on ZnO:Al thin layers have been investigated by analysing the optical and structural properties of the films. A substrate temperature of 770 K allows the preparation of nanosized ZnO:Al crystals with preferred [002] orientation. Films with optical transmission T>85% and a adjustable resistivity ρ between 2 and 100 Ω cm have been obtained. The resistivity value of the films can be adjusted by tuning suitable processing parameters. The feasibility of the spray pyrolysis technique for the preparation of thin semiconducting ZnO:Al films on conventional soda lime glass substrates is demonstrated.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
